Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-10-10
2006-10-10
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S071000
Reexamination Certificate
active
07119880
ABSTRACT:
A projection optical system for performing reduction projection of a pattern of a reticle onto a projection plane. The system includes a first mirror having a concave reflective surface, a second mirror having a reflective surface, a third mirror having a convex reflective surface, a fourth mirror having a concave reflective surface, a fifth mirror having a convex reflective surface, and a sixth mirror having a concave reflective surface. The reflective surface of the fourth mirror has a curvature radius of not less than 400 mm and not more than 800 mm in absolute value. The reflective surface of the sixth mirror has a curvature radius of not less than 400 mm and not more than 600 mm in absolute value, and the reflective surfaces of the first, second, third, fourth, fifth and sixth mirrors have curvatures of not more than 1500 mm in absolute value, respectively.
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European Search Report dated Sep. 5, 2005, Issued in corresponding European patent appln. No. EP 03 02 5299, forwarded in a Communication dated Oct. 7, 2005.
Communication pursuant to Article 96(2)EPC dated Jan. 31, 2006, issued in corresponding European patent application No. 03 025 299.3.
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Rutledge D.
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