MEM structure having reduced spring stiction

Details MEM structure having reduced spring stiction MEM structure having reduced spring stiction

2006-02-21

2006-02-21

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514380

Reexamination Certificate

active

07000473

ABSTRACT:
A micro-electromechanical (MEM) device has a folded tether spring in which each fold of the spring is surrounded by a rigidly fixed inner structure and outer structure. The fixed inner structure increases restoring force of the spring. The rigidly fixed inner and outer structures each have a major surface that include a plurality of notches of fixed width relative to a distance between the major surface and the spring. Additionally in one form extensions from the major surface of the rigidly fixed inner and outer structures are provided at distal ends thereof to make initial contact with the spring. The notches of the MEM device both reduce surface area contact with the spring and wick moisture away from the spring to minimize stiction.

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Kionix Webpage (http://www.kionix.com); Description of Kionix Accelerometer; 2 pgs; [online] [retrieved on Mar. 11, 2004].

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