Active matrix substrate, electro-optical device, electronic...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...

Reexamination Certificate

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Details

C257S059000, C257S088000, C257S202000, C257S291000, C257S390000, C257SE27110, C257SE27121, C257SE25028, C438S157000, C438S405000, C438S417000

Reexamination Certificate

active

07148511

ABSTRACT:
An active matrix substrate includes a load circuit including a first active element performing a switching operation of a load, the first active element including a semiconductor film of a substantially polycrystalline state; a drive circuit including a second active element controlling driving the load, the second active element including a semiconductor film of a substantially single crystalline state, a hole being provided to one of a part and a peripheral part of the semiconductor film, the hole functioning a starting point for crystallizing the semiconductor film; and a substrate on a same plane of which the load circuit and the drive circuit are formed.

REFERENCES:
patent: 6140667 (2000-10-01), Yamazaki et al.
patent: 2004/0108989 (2004-06-01), Gyouten et al.
patent: 2004/0130520 (2004-07-01), Maeda et al.
patent: 2004/0233503 (2004-11-01), Kimura
patent: 2005/0030265 (2005-02-01), Miyagawa
patent: A 5-134272 (1993-05-01), None
“Single Crystal Thin Film Transistors, ” IBM Technical Disclosure Bulletin, pp. 257-258, Aug. 1993.
Ishihara et al., Advanced Excimer-Laser Crystallization Techniques of Si Thin-Film for Location Control of Large Grain on Glass, Flat Panel Display Technology and Display Metrology II, Proceedings of SPIE, vol. 4295, pp. 14-23, 2001.

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