Method for contactless testing of conducting paths in a substrat

Details Method for contactless testing of conducting paths in a substrat Method for contactless testing of conducting paths in a substrat

1987-10-09

1989-09-19

Karlsen, Ernest F.

Electricity: measuring and testing

Plural, automatically sequential tests

324158R, 324501, 324538, G01R 3102

Patent

active

048684929

ABSTRACT:
For testing the integrity of conducting lines on or in a substrate, the following steps are executed: (I) Selected pads are irradiated by a focused optical beam so that they are positively charged due to photon-assisted tunneling of electrons from those pads. The charges propagate through existing conductors so that all selected pads and all pads connected to them assume a specific voltage. (II) The whole surface is irradiated by a flooding optical beam. Photon-assisted tunneling of electrons will now occur from those pads which were not charged previously. (III) The tunneling electrons excite an electroluminescent layer whose illumination reveals the spatial distribution of uncharged pads. This method is performed in air under atmospheric conditions and allows completely contactless testing of circuitry to detect line interruptions as well as shortcuts between separate lines. It is suited for surface lines, buried lines and for via connections.

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