Catoptric imaging systems comprising pellicle and/or...

Details Catoptric imaging systems comprising pellicle and/or... Catoptric imaging systems comprising pellicle and/or...

2006-12-05

2006-12-05

Turner, Samuel A. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07145663

ABSTRACT:
An interferometry system including: a first imaging system that directs a measurement beam at an object to produce a return measurement beam from the object, that directs the return measurement beam onto an image plane, and that delivers a reference beam to the image plane; and a beam combining element in the image plane, said beam combining element comprising a first layer containing an array of sagittal slits and a second layer containing an array of tangential slits, wherein each slit of the array of sagittal slits is aligned with a corresponding different slit of the array of tangential slits, wherein the beam combining element combines the return measurement beam with the reference beam to produce an array of interference beams.

REFERENCES:
patent: 3628027 (1971-12-01), Brauss
patent: 3748015 (1973-07-01), Offner
patent: 4011011 (1977-03-01), Hemstreet et al.
patent: 4226501 (1980-10-01), Shafer
patent: 4272684 (1981-06-01), Seachman
patent: 4408884 (1983-10-01), Kleinknecht et al.
patent: 4672196 (1987-06-01), Canino
patent: 4685803 (1987-08-01), Sommargren
patent: 4733967 (1988-03-01), Sommargren
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5241423 (1993-08-01), Chiu et al.
patent: 5327223 (1994-07-01), Korth
patent: 5384639 (1995-01-01), Wickramasinghe
patent: 5392118 (1995-02-01), Wickramasinghe
patent: 5485317 (1996-01-01), Perissinotto
patent: 5602643 (1997-02-01), Barrett
patent: 5614763 (1997-03-01), Womack
patent: 5633972 (1997-05-01), Walt et al.
patent: 5659420 (1997-08-01), Wakai
patent: 5699201 (1997-12-01), Lee
patent: 5757493 (1998-05-01), Vaknerkhove
patent: 5760901 (1998-06-01), Hill
patent: 5828455 (1998-10-01), Smitth
patent: 5894195 (1999-04-01), McDermott
patent: 5915048 (1999-06-01), Hill et al.
patent: 5923423 (1999-07-01), Sawatari et al.
patent: 6011654 (2000-01-01), Schweizer et al.
patent: 6018391 (2000-01-01), Yoshida
patent: 6052231 (2000-04-01), Rosenbluth
patent: 6091496 (2000-07-01), Hill
patent: 6124931 (2000-09-01), Hill
patent: 6271923 (2001-08-01), Hill
patent: 6330065 (2001-12-01), Hill
patent: 6445453 (2002-09-01), Hill
patent: 6447122 (2002-09-01), Kobayashi et al.
patent: 6469788 (2002-10-01), Boyd et al.
patent: 6480285 (2002-11-01), Hill
patent: 6552805 (2003-04-01), Hill
patent: 6552852 (2003-04-01), Hill
patent: 6597721 (2003-07-01), Hutchinson et al.
patent: 6606159 (2003-08-01), Hill
patent: 6667809 (2003-12-01), Hill
patent: 6707561 (2004-03-01), Budach et al.
patent: 6714349 (2004-03-01), Nam
patent: 6717736 (2004-04-01), Hill
patent: 6753968 (2004-06-01), Hill
patent: 6771374 (2004-08-01), Rangarajan et al.
patent: 6775009 (2004-08-01), Hill
patent: 6806959 (2004-10-01), Tukker
patent: 6847029 (2005-01-01), Hill
patent: 6847452 (2005-01-01), Hill
patent: 2002/0074493 (2002-06-01), Hill
patent: 2002/0131179 (2002-09-01), Hill
patent: 2003/0174992 (2003-09-01), Levene
patent: 2004/0201852 (2004-10-01), Hill
patent: 2004/0201853 (2004-10-01), Hill
patent: 2004/0201854 (2004-10-01), Hill
patent: 2004/0201855 (2004-10-01), Hill
patent: 2004/0202426 (2004-10-01), Hill
patent: 2004/0227950 (2004-11-01), Hill
patent: 2004/0227951 (2004-11-01), Hill
patent: 2004/0228008 (2004-11-01), Hill
patent: 2004/0246486 (2004-12-01), Hill
patent: 2004/0257577 (2004-12-01), Hill
patent: 2005/0036149 (2005-02-01), Hill
patent: 2005/0111006 (2005-05-01), Hill
patent: 2005/0111007 (2005-05-01), Hill
U.S. Appl. No. 60/442,858, filed Jan. 27, 2003, Hill.
U.S. Appl. No. 60/444,707, filed Feb. 4, 2003, Hill.
U.S. Appl. No. 60/448,360, filed Feb. 19, 2003, Hill.
U.S. Appl. No. 60/485,255, filed Jul. 7, 2003, Hill.
U.S. Appl. No. 60/507,675, filed Oct. 1, 2003, Hill.
U.S. Appl. No. 60/573,196, filed May 21, 2004, Hill.
U.S. Appl. No. 60/568,774, filed May 6, 2004, Hill.
U.S. Appl. No. 60/485,507, filed Jul. 7, 2003, Hill.
U.S. Appl. No. 60/459,425, filed Apr. 11, 2003, Hill.
U.S. Appl. No. 60/445,739, filed Feb. 7, 2003, Hill.
U.S. Appl. No. 60/442,982, filed Jan. 29, 2003, Hill.
U.S. Appl. No. 60/448,250, filed Feb. 19, 2003, Hill.
U.S. Appl. No. 60/460,129, filed Apr. 3, 2003, Hill.
U.S. Appl. No. 60/506,715, filed Sep. 26, 2003, Hill.
U.S. Appl. No. 60/571,967, filed May 18, 2004, Hill.
U.S. Appl. No. 60/569,807, filed May 11, 2004, Hill.
U.S. Appl. No. 60/501,666, filed Sep. 10, 2003, Hill.
U.S. Appl. No. 60/459,493, filed Apr. 1, 2003, Hill.
U.S. Appl. No. 60/447,254, filed Feb. 13, 2003, Hill.
U.S. Appl. No. 60/443,980, filed Jan. 31, 2003, Hill.

Affiliated with

Also associated with

Rating

Catoptric imaging systems comprising pellicle and/or... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Catoptric imaging systems comprising pellicle and/or..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Catoptric imaging systems comprising pellicle and/or... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3708222