Multipole field-producing apparatus in charged-particle...

Details Multipole field-producing apparatus in charged-particle... Multipole field-producing apparatus in charged-particle...

2006-06-13

2006-06-13

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S3960ML

Reexamination Certificate

active

07060985

ABSTRACT:
Spherical aberration correction optics are offered which have an auxiliary function of determining control parameters easily and at any time while canceling deflecting and quadrupole fields in the instrument. The correction optics have a control unit for determining the parameters of the aberration correction optics and parameters for canceling the deflecting and quadrupole fields, a power supply for applying electric potentials or magnetic potentials to the aberration correction optics based on a signal from the control unit, and a period-varying circuit positioned between the control unit and the power supply to add a signal whose amplitude is varied continuously at frequency f with respect to real time t.

REFERENCES:
patent: 5051593 (1991-09-01), Ishihara
patent: 6646267 (2003-11-01), Haider et al.
patent: 2002/0121609 (2002-09-01), Hosokawa
patent: 2003/0029999 (2003-02-01), Hosowaka
patent: 2003/0122076 (2003-07-01), Matsuya et al.

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