Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-06-20
2006-06-20
Patel, Ramesh (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S117000, C700S118000, C700S119000, C700S120000, C438S005000, C438S007000, C438S016000, C359S896000, C430S030000
Reexamination Certificate
active
07065427
ABSTRACT:
A multi-layer immersion medium monitoring system for a lithographic process monitors characteristics of an immersion medium of a semiconductor manufacturing process. The multi-layer immersion medium includes at least a first liquid of a first density (or viscosity) and a second liquid of a lower density (or viscosity), both of which are interspersed between a final optical component and a semiconductor layer. The higher density layer is provided to reduce turbulence in the immersion medium during the lithographic processes. A scatterometry system monitors optical characteristics of the multi-layer immersion medium to effectuate control of a lithographic process.
REFERENCES:
patent: 4894549 (1990-01-01), Stengl
patent: 5121256 (1992-06-01), Corle et al.
patent: 5900354 (1999-05-01), Batchelder
patent: 6617587 (2003-09-01), Parker et al.
patent: 6844206 (2005-01-01), Phan et al.
patent: 2005/0084770 (2005-04-01), Vollrath et al.
patent: 2005/0205108 (2005-09-01), Chang et al.
patent: 2005/0231695 (2005-10-01), Wang et al.
Dakshina-Murthy Srikanteswara
Phan Khoi A.
Rangarajan Bharath
Singh Bhanwar
Subramanian Ramkumar
Amin & Turocy LLP
Patel Ramesh
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