Setter, method for manufacturing ceramic substrate, and...

Details Setter, method for manufacturing ceramic substrate, and... Setter, method for manufacturing ceramic substrate, and...

2006-10-24

2006-10-24

McNeil, Jennifer C. (Department: 1775)

Stock material or miscellaneous articles

Structurally defined web or sheet

Continuous and nonuniform or irregular surface on layer or...

C428S325000, C264S679000, C264S681000, C432S253000, C432S258000

Reexamination Certificate

active

07125600

ABSTRACT:
A setter and a method for manufacturing a ceramic substrate are capable of suppressing deformation such as warpage occurring in a ceramic substrate after baking. A ceramic green sheet 4 is mounted and baked on a mount surface of a zirconia setter wherein an average particle size is 0.3 μm, a porcelain density is not less than 6 kg/dm3, a thermal conductivity is not more than 5 W/mK, and an arithmetic average roughness of the mount surface is 1 μm–20 μm, whereby it is feasible to suppress the deformation such as warpage occurring in a piezoelectric ceramic substrate after baked.

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patent: A 2001-192274 (2001-07-01), None
patent: A 2002-104891 (2002-04-01), None

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