Micromirror device

Details Micromirror device Micromirror device

2006-10-03

2006-10-03

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C369S290100, C369S223000, C369S224000

Reexamination Certificate

active

07116465

ABSTRACT:
There is provided a micromirror device, which is provided with a mirror layer including a mirror surface which is supported to be rotatable around a first axis passing through a center of the mirror surface, and an upper substrate having transparency including a first upper electrode part and a second upper electrode part arranged on its surface facing the mirror layer to face each other via a first upper boundary passing through a center of the surface and parallel to the first axis, and a lower substrate including a first lower electrode part and a second lower electrode part arranged on its surface facing the mirror layer to face each other via a first lower boundary passing through a center of the surface and parallel to the first axis. The upper substrate is stacked on one side of the mirror layer while securing a first space between the center of the mirror surface and the first and second upper electrode parts, while the lower substrate is stacked on the other side of the mirror layer while securing a second space between the center of the mirror surface and the first and second lower electrode parts. The mirror surface is rotated around the first axis by applying voltage to a pair of the electrodes placed diagonally with respect to the first axis.

REFERENCES:
patent: 5799643 (1998-09-01), Miyata et al.
patent: 6473221 (2002-01-01), Ueda et al.
patent: 6431714 (2002-08-01), Sawada et al.
patent: 6545260 (2003-04-01), Katashiro et al.
patent: 6633426 (2003-10-01), Shrauger et al.
patent: 6891650 (2005-05-01), Mizuno et al.
patent: 2002/0018276 (2002-02-01), Suga
patent: 2002/0167712 (2002-11-01), Shrauger et al.
patent: 2003/0016906 (2003-01-01), Utsunomiya
patent: 2003-29172 (2003-01-01), None
patent: 2003-57575 (2003-02-01), None
T.J. Brosnihan et al., The 12thInternational Conference on Solid State Sensors, Actuators and Microsystems, Boston, Jun. 8-12, 2003, IEEE, 2003, pp. 1638-1642.
U.S. Appl. No. 11/042,157 to Mizuno, which was filed on Jan. 26, 2005.

Affiliated with

Also associated with

Rating

Micromirror device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micromirror device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromirror device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3703571