Methods for producing waveguides

Details Methods for producing waveguides Methods for producing waveguides

2006-06-06

2006-06-06

Lam, Cathy F. (Department: 1775)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S619000, C438S780000, C438S781000

Reexamination Certificate

active

07056754

ABSTRACT:
Methods for producing waveguides are disclosed. In one embodiment, a waveguide is produced by depositing a first metal layer on a substrate, depositing a sacrificial material on the first metal layer, depositing a second metal layer on the sacrificial material, the second metal layer contacting the first metal layer and defining therebetween a cavity for the waveguide, the cavity filled with the sacrificial material, and removing the sacrificial material.

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