Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture
Reexamination Certificate
2006-06-27
2006-06-27
Johnson, Edward M. (Department: 1754)
Chemistry of inorganic compounds
Modifying or removing component of normally gaseous mixture
C502S407000
Reexamination Certificate
active
07067091
ABSTRACT:
An object of the present invention is to provide a treatment agent superior in harm-removing performance to metal hydride containing exhaust gas, and its production method as well as a treatment method. It is a mixture of either copper hydroxide or basic copper carbonate and silicon compound or a mixture, wherein parts of said copper compound and said silicon compound form a complex. A preparation of the treatment agent is made by a precipitation method, wherein a copper salts solution serves as a precipitation mother solution, and a mixture solution of either alkali hydroxide or alkali carbonate and alkali silicate serves as a precipitating agent. A treatment agent obtained as its result shows a high harm-removing performance to the metal hydride gas and a low heat generation, for which reason the agent is useful for treatment of the metal hydride containing exhaust gas generated in semiconductor manufacturing.
REFERENCES:
patent: 4743435 (1988-05-01), Kitahara et al.
patent: 5213767 (1993-05-01), Smith et al.
patent: 5538702 (1996-07-01), Smith et al.
patent: 5853678 (1998-12-01), Sugimori et al.
patent: 5885845 (1999-03-01), Sugimori et al.
patent: 0 194 366 (1986-09-01), None
patent: 0 294 142 (1988-12-01), None
patent: 61-129026 (1986-06-01), None
patent: 2-126936 (1990-05-01), None
patent: 6-327931 (1994-11-01), None
patent: WO 95/18674 (1995-07-01), None
Matsuda Yoshihiro
Shibano Hidetaka
Takachi Minoru
Teshigawara Satoshi
Tomiyama Yoshiyuki
Johnson Edward M.
Sued-Chemie Catalysts Japan Inc.
Young & Thompson
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