Sensor having membrane

Details Sensor having membrane Sensor having membrane

2006-02-14

2006-02-14

Porta, David (Department: 2878)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

06998612

ABSTRACT:
A sensor includes a detector for detecting physical quantity, a membrane, and a stress relaxation area. A stress is expected to concentrate in the stress relaxation area in a case of manufacturing process of the sensor or a case of operating the sensor. The detector is disposed on the membrane except for the stress relaxation area.

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patent: 6388255 (2002-05-01), Di Maio et al.
patent: 6720559 (2004-04-01), Kubo
patent: 6793389 (2004-09-01), Chavan et al.
patent: 2003/0111605 (2003-06-01), Sato et al.
patent: A-4-98883 (1992-03-01), None
patent: 07198474 (1995-08-01), None

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