Gas conduit for a load lock chamber

Details Gas conduit for a load lock chamber Gas conduit for a load lock chamber

2006-02-14

2006-02-14

Douglas, Steven O. (Department: 3751)

Fluent material handling, with receiver or receiver coacting mea

Combined

C141S066000, C414S217000, C414S291000, C414S935000

Reexamination Certificate

active

06997217

ABSTRACT:
A gas conduit for a load lock chamber. The gas conduit connects to a gas source to introduce gas from the gas source into the load lock chamber of semiconductor equipment. The structure includes a filter mounted on the top surface of the load lock chamber, a pressure limitative device to maintain a preset pressure of gas source, and a gas inlet device including an inlet end connected to the pressure limitative device and an outlet end connected to the filter, wherein the gas inlet device introduces gas from the gas source into the load lock chamber with its maximum flow rate when breaching the vacuum therein.

REFERENCES:
patent: 6135168 (2000-10-01), Yang et al.
patent: 6368411 (2002-04-01), Roberson, Jr. et al.
patent: 6715495 (2004-04-01), Dao et al.
patent: 6758876 (2004-07-01), Suzuki et al.

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