Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-06-27
2006-06-27
Dang, Hung Juan (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224200
Reexamination Certificate
active
07068415
ABSTRACT:
A deformable mirror according to the present invention includes a substrate1, a plurality of micromirrors20, which are supported by the substrate1while being segmented from each other, and a plurality of driving sections, which drive the micromirrors20independently of each other. Each of the driving sections includes a number of fixed electrodes5to7, and the same number of movable electrodes13to15, which are provided so as to face the fixed electrodes5to7. Each of the micromirrors20is coupled to at least two of the movable electrodes13to15, which are associated with the micromirror20.The deformable mirror can displace each micromirror20perpendicularly to the substrate1and/or tilt the micromirror20with respect to the substrate.
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Akin Gump Strauss Hauer & Feld & LLP
Dang Hung Juan
Matsushita Electric - Industrial Co., Ltd.
Tra Tuyen
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