Ultraviolet irradiating method and an apparatus using the same

Details Ultraviolet irradiating method and an apparatus using the same Ultraviolet irradiating method and an apparatus using the same

2006-08-15

2006-08-15

Berman, Jack (Department: 2881)

Radiant energy

Supported for nonsignalling objects of irradiation

With source support

C250S365000, C250S372000, C250S461100

Reexamination Certificate

active

07091499

ABSTRACT:
An ultraviolet irradiating apparatus for emitting ultraviolet light toward a work piece. The work piece, e.g. a semiconductor wafer, is held by a ring-shaped frame through an ultraviolet sensitive adhesive tape applied to the back surface of the wafer. The apparatus includes an ultraviolet irradiating section having a regulating member disposed in a lower position of a support base. The regulating member is provided to limit a downward displacement of the wafer.

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European Search Report, Application No.: 04003567.7-2203, date Mar. 27, 2006.

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