Process for the hydrogenation of silicon tetrachloride

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing

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423341, 423347, 423DIG10, 204164, C01B 33107

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active

045420041

ABSTRACT:
An improved process is disclosed for the high pressure plasma hydrogenation of silicon tetrachloride. Hydrogen and silicon tetrachloride are reacted in the presence of a high pressure plasma and further in the presence of a boron catalyst to form trichlorosilane and dichlorosilane. By adding the boron catalyst the overall conversion efficiency is increased and the dichlorosilane content in the reaction effluent is increased.

REFERENCES:
patent: 2406605 (1946-08-01), Hurd
patent: 2458703 (1949-01-01), Hatcher
patent: 2877097 (1959-03-01), Wolff
patent: 3126248 (1964-03-01), Pohl et al.
patent: 4309259 (1982-01-01), Sarma et al.
patent: 4321246 (1982-03-01), Sarma et al.

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