Semiconductor optical waveguide structure

Details Semiconductor optical waveguide structure Semiconductor optical waveguide structure

2006-06-13

2006-06-13

Fourson, George (Department: 2823)

Coherent light generators

Particular active media

Semiconductor

C385S014000

Reexamination Certificate

active

07061954

ABSTRACT:
A method for manufacturing a semiconductor optical waveguide comprises the steps of forming a core layer having an Al content which monotonically increases from the central part thereof to the film surface, and selectively oxidizing the core layer to obtain a peripheral, oxidized region and a central, non-oxidized region acting as a waveguide. The waveguide is tapered to have a circular mode field at the distal end thereof for efficiently coupling with an optical fiber.

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