Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-10-24
2006-10-24
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07126697
ABSTRACT:
Standard patterns of differential values of interference light that correspond to a predetermined step height of the first material being processed and standard patterns of differential values of interference light that correspond to a predetermined remaining mask layer thickness of the material are set. These standard patterns use wavelengths as parameters. Then, the intensities of interference light of multiple wavelengths are measured for a second material that has the same structure as the first material. Actual patterns with wavelength as parameter are determined from differential values of the measured interference light intensities. Based on the standard patterns and the actual patterns of the differential values, the step height and the remaining mask layer thickness of the second material are determined.
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Fujii Takashi
Kaji Tetsunori
Usui Tatehito
Yamamoto Hideyuki
Yoshigai Motohiko
Hitachi , Ltd.
Lyons Michael A.
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