Method of detecting a fault in a micro-electromechanical device

Details Method of detecting a fault in a micro-electromechanical device Method of detecting a fault in a micro-electromechanical device

2006-02-14

2006-02-14

Feggins, K. (Department: 2853)

Incremental printing of symbolic information

Ink jet

Controller

C347S054000

Reexamination Certificate

active

06997537

ABSTRACT:
A method of detecting a fault within a micro-electromechanical device includes the step of passing a series of predetermined current pulses through a movable component of the device to generate reciprocal displacement of the component. A predetermined extent of displacement of the component is detected. A performance characteristic of the device is determined based on a relationship between said predetermined current pulses and said predetermined extent of displacement of the component. A variation from said relationship during subsequent operational use of the device is sensed.

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Design, Fabrication, and Teting of a C-Shape Actuator; G Lin, CJ Kim, S Konishi, H Fujita; IfM, Louisiana Tech Univ., PO Box 10348, Rustom, LA 71272, USA; Mane Dept, UCLA, Los Angeles, CA 90095, USA; IIS, Univ of Tokyo, Roppongi, Minato-ku, Tokyo 106 Japan.

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