Driving unit, exposure apparatus using the same, and device...

Details Driving unit, exposure apparatus using the same, and device... Driving unit, exposure apparatus using the same, and device...

2006-12-05

2006-12-05

Nguyen, Henry Hung (Department: 2851)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S090500, C355S072000, C355S075000

Reexamination Certificate

active

07145270

ABSTRACT:
A driving unit includes an actuator for actuating a target and a magnetic dampener for controlling a vibration of the target, wherein the driving unit controls the vibration of the target, which is generated by the actuation of the actuator, by using the magnetic dampener.

REFERENCES:
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patent: 6084329 (2000-07-01), Fujita et al.
patent: 6327026 (2001-12-01), Wakui
patent: 6888620 (2005-05-01), Lee et al.
patent: 2002/0163741 (2002-11-01), Shibazaki
patent: 11-44834 (1999-02-01), None
patent: 11-233039 (1999-08-01), None
Seto, Kazuo, “Vibration Control Method Using Magnetic Damping,” Journal of the Japan Society of Mechanical Engineers, Series C, vol. 56, No. 525, 1990, pp. 1079-1086 (Section 1, 2-3-1. (English Translation Attached).

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