Optical modulator and manufacturing method of optical modulator

Details Optical modulator and manufacturing method of optical modulator Optical modulator and manufacturing method of optical modulator

2006-10-31

2006-10-31

Ben, Loha (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S295000, C359S245000, C216S002000, C385S147000

Reexamination Certificate

active

07130103

ABSTRACT:
Provided is an optical modulator capable of forming an optical gap easily and accurately without having to perform underetching to the sacrifice layer. An optical modulator includes a first substrate provided with a first concave portion in which the bottom part becomes a moving part, and a movable reflection film being formed on the moving part; and a second substrate provided with a second concave portion having a diameter that is smaller than the diameter of the first concave portion at a position facing the first concave portion, and a fixed reflection film being formed on the bottom part of the second concave portion; wherein the depth of the first concave portion prescribes the movable range of the movable reflection film, and an optical gap is prescribed based on the spacing between movable reflection film and the fixed reflection film.

REFERENCES:
patent: 6341039 (2002-01-01), Flanders et al.
patent: 6674562 (2004-01-01), Miles
patent: 6787051 (2004-09-01), Silverbrook
patent: 6867896 (2005-03-01), Miles
patent: 6942814 (2005-09-01), Wood et al.
patent: 6947195 (2005-09-01), Ohtaka et al.
patent: 7034981 (2006-04-01), Makigaki
patent: 2002-174721 (2002-06-01), None

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