Semiconductor device characteristics measurement apparatus...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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07068061

ABSTRACT:
A semiconductor-device characteristic measurement apparatus includes first measuring unit for measuring a first electrical characteristic of a device under test, second measuring unit, switch for switching between the first measuring unit and the second measuring means such that one of the measuring unit is connected to the device under test, and controller for controlling the switching means. The switch includes switches that switch between a first wiring configuration for electrically connecting the first measuring unit to the device under test and a second wiring configuration for electrically connecting the second measuring unit to the device under test. The switch is electrically connected to the device under test at a position closer to the device under test than the first measuring unit and the second measuring unit.

REFERENCES:
patent: 4618818 (1986-10-01), Horn
patent: 6069484 (2000-05-01), Sobolewski et al.
patent: 6856158 (2005-02-01), Frame et al.
Hewlett Packard, “HP 4155B—Semiconductor Parameter Analyzer; HP 4156B—Precision Semiconductor Parameter Analyzer”; Technical Data, Jul. 1997, 10 pps.
Agilent Technologies, “Agilent E5250A—Low Leakage Swtich Mainframe”, Technical Data, Dec. 1, 2000, 4 pps.
Agilent Technologies, “Agilent 4284A/4285A—Precision LCR Meter Family”; Technical Overview, Jan. 30, 2003, 28 pps.

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