Radiant energy – Electrically neutral molecular or atomic beam devices and...
Reexamination Certificate
2006-12-05
2006-12-05
Wells, Nikita (Department: 2881)
Radiant energy
Electrically neutral molecular or atomic beam devices and...
C355S053000, C355S030000
Reexamination Certificate
active
07145132
ABSTRACT:
A debris trapping system for trapping debris particles released with the generation of radiation by a radiation source in a lithographic apparatus includes first and second sets of channels. Each channel of the first set enables radiation from a radiating source to propagate therethrough and has an inner wall for catching debris particles. The second set of channels is situated downstream of the first set with respect to a propagation direction of the radiation. Each channel of the second set enables radiation from the radiating source to also propagate therethrough and has an inner wall for catching debris particles. A gas supply and a gas exhaust are configured to provide between the first set and the second set of channels a gas flow having a net flow direction substantially across the propagation direction of the radiation from a radiating source.
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Bakker Levinus Pieter
Klunder Derk Jan Wilfred
Van Herpen Maarten Marinus Johannes Wilhelmus
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Smith II Johnnie L
Wells Nikita
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