Imaging energy filter for electrons and other electrically...

Radiant energy – Ionic separation or analysis – Cyclically varying ion selecting field means

Reexamination Certificate

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C250S305000, C250S281000

Reexamination Certificate

active

07126117

ABSTRACT:
An imaging energy filter for electrons and other charged particles filters an object formed by these particles at the filter inlet by means of an energetic selection of charged particles in the region of a dispersion aperture. The filter includes two concentric and spherical electrodes, which produce an electrostatic field that deflects the charged particles at an angle α that is greater than π and less than 2π. The deflector, operating as a deflecting element that generates a deflection field, is disposed at an intersection point of the inlet axis and the outlet axis and in a plane of symmetry of the angle α, wherein the plane of symmetry simultaneously is an electro-optical plane. The deflection field generated by the deflecting element deflects the charged particles by an angle π−α/2, leading to a total deflection angle of 2π and co-linearity of the inlet axis and outlet axis.

REFERENCES:
patent: 5107111 (1992-04-01), Daimon et al.

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