Method for processing interferometric measurement data

Details Method for processing interferometric measurement data Method for processing interferometric measurement data

1998-12-18

2000-03-07

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, G01B 902

Patent

active

060347724

ABSTRACT:
A method for processing interferometric measurement data representative of a physical property of an object, such as the thickness of material M. A plurality of interference signals are acquired and stored with respect to a length L, and a dimension of length L over which the plurality of interference signals were acquired is determined. A location of all peaks of the interference signals is then determined with respect to a start position of the acquisition of the plurality of interference signals. The interferometer peaks which are representative of the physical property of the object are then determined and stored.

REFERENCES:
patent: 3319515 (1967-05-01), Flournoy
patent: 5473432 (1995-12-01), Sorin
patent: 5596409 (1997-01-01), Marcus et al.
patent: 5610716 (1997-03-01), Sorin et al.
patent: 5659392 (1997-08-01), Marcus et al.
patent: 5731876 (1998-03-01), Venkatesh et al.
patent: 5850287 (1998-12-01), Sorin et al.

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