Process for producing monomer

Details Process for producing monomer Process for producing monomer

2006-10-24

2006-10-24

Dentz, Bernard (Department: 1625)

Chemistry: molecular biology and microbiology

Micro-organism, tissue cell culture or enzyme using process...

Preparing heterocyclic carbon compound having only o, n, s,...

C435S124000, C435S125000, C435S127000

Reexamination Certificate

active

07125692

ABSTRACT:
A process for producing a monomer for resists represented by the following general formula 1:wherein R1represents hydrogen or an optionally substituted alkyl group; R2, R3and R4each independently represent hydrogen or a substituent; and X, Y and Z each independently represent a direct bond or an optionally substituted alkylene group with 1 to 3 chain members,the process comprising carrying out esterification or transesterification in the presence of a biocatalyst.

REFERENCES:
patent: 0 439 779 (1991-08-01), None
patent: 514694 (1992-11-01), None
patent: 4-279576 (1992-10-01), None
patent: 5-219970 (1993-08-01), None
patent: 10-212283 (1998-08-01), None
patent: 2001-235867 (2001-08-01), None
patent: 2001-247513 (2001-09-01), None
Koji Nozaki, et al., “A new single-layer resist for 193-nm lithography”, Jpn, J. Appl. Phys., vol. 35, No. 4B, pp.: L528-530 Apr. 15, 1996.

Affiliated with

Also associated with

Rating

Process for producing monomer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for producing monomer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for producing monomer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3681682