Self-cleaning valve and cryopump utilizing the same

Fluid handling – With cleaner – lubrication added to fluid or liquid sealing... – Cleaning or steam sterilizing

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Details

15246, 62 555, 62268, 92 78, 92200, 13751627, 137536, 137540, 417901, F16K 1500, B08B 900, B01D 500

Patent

active

047199385

ABSTRACT:
The pressure relief valve is debris resistant, self-cleaning, and self-actuating in a cryopump. It includes an o-ring carried by a valve member within a valve cylinder. In opening, the valve member moves away from an end port to open vent ports in the side of the valve cylinder while withdrawing the o-ring to a debris free and protected region of the valve. As the valve member is moved into the closed position in response to an atmospherical pressure differential, a wiper ring cleans debris from the inner surface of the valve cylinder. A taper is provided on the inner surface of the cylinder to release compression on the vacuum sealing o-ring upon opening and to compress the o-ring as the valve member moves to the closed position. The wiper ring is expansible in order to provide a wiping action along the entire taper and prevent debris from reaching the o-ring. The end of the valve cylinder opposite to the end port serves as a shock absorber as the valve is opened. An outer connecting flange is provided for connection of an exhaust housing.

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