Optical waveguides – With optical coupler – Switch
Reexamination Certificate
2006-08-15
2006-08-15
Doan, Jennifer (Department: 2874)
Optical waveguides
With optical coupler
Switch
C385S015000, C385S016000
Reexamination Certificate
active
07092593
ABSTRACT:
A movable plate is fastened to a substrate via flexure parts and can move upward and downward with respect to the substrate. The substrate serves as a fixed electrode. The movable plate has second electrode parts which generate an electrostatic force between these electrode parts and the substrate by virtue of a voltage that is applied across these electrode parts and the substrate and a current path which is disposed in a magnetic field, and which generates a Lorentz force when powered. A mirror advances into and withdraws from the optical path. When the movable plate moves from the lower position in which the electrostatic force is increased to the upper position, the control part controls the current so that the Lorentz force is generated in a downward orientation and gradually decreases while the movable plate moves from an intermediate position to the upper position.
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Akagawa Keiichi
Kanaya Masatoshi
Kurumada Katsuhiko
Suzuki Yoshihiko
Tamamura Toshiaki
Doan Jennifer
Frishauf Holtz Goodman & Chick P.C.
Nikon Corporation
NTT Electronics Corporation
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