Laser oscillation apparatus, exposure apparatus,...

Details Laser oscillation apparatus, exposure apparatus,... Laser oscillation apparatus, exposure apparatus,...

2006-12-05

2006-12-05

Harvey, Minsun Oh (Department: 2828)

Coherent light generators

Particular beam control device

Optical output stabilization

C372S032000, C372S020000, C372S025000, C372S033000

Reexamination Certificate

active

07145925

ABSTRACT:
A laser oscillation apparatus includes a wavelength change unit for driving a wavelength selection element in a band-narrowing module and changing the oscillation wavelength of a laser beam to a target value, and an oscillation history memory for storing the oscillation state of the laser beam as an oscillation history. The wavelength change unit drives the wavelength selection element on the basis of the oscillation history and changes the oscillation wavelength of the laser beam to the target value.

REFERENCES:
patent: 4905041 (1990-02-01), Aketagawa
patent: 5142543 (1992-08-01), Wakabayashi et al.
patent: 5373515 (1994-12-01), Wakabayashi et al.
patent: 5420877 (1995-05-01), Sandstrom
patent: 5748316 (1998-05-01), Wakabayashi et al.
patent: 5838426 (1998-11-01), Shinonaga et al.
patent: 6078599 (2000-06-01), Everage et al.
patent: 6252650 (2001-06-01), Nakamura
patent: 6434173 (2002-08-01), Tuganov et al.
patent: 6870865 (2005-03-01), Nagai et al.
patent: 7031364 (2006-04-01), Sano et al.
patent: 2002/0141464 (2002-10-01), Bushida et al.
patent: 2003/0142715 (2003-07-01), Nagai
patent: WO 86/00427 (1986-01-01), None
patent: 0 570 243 (1993-11-01), None
patent: 0 742 492 (1996-11-01), None
European Search Report dated Oct. 28, 2003, issued in corresponding European patent application No. 10 30 3730, forwarded in Communication dated Nov. 6, 2003.

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