MEMS mirror with amplified motion

Details MEMS mirror with amplified motion MEMS mirror with amplified motion

2006-11-28

2006-11-28

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave directional modulation

C359S290000, C359S291000, C359S295000

Reexamination Certificate

active

07142352

ABSTRACT:
A MEMS device achieves a large angle of rotation of a plate about 2 independent axes by employing a handle portion of the plate which is isolated by respective springs coupling the handle portion to each of two actuators. A first actuator, which rotates the mirror about the same axis as done in U.S. Pat. No. 6,781,744 is essentially the same structure disclosed therein, but with the mirror plate thereof shrunken in size. This shrunken plate is coupled by a spring to the mirror plate of the instant invention. Movement of the shrunken plate causes corresponding movement of the handle portion, and hence the mirror. A second actuator, coupled by another spring to the mirror plate of the instant invention, rotates about a second axis that is perpendicular to the first axis and parallel to the substrate. The second actuator includes an actuator plate and an electrode thereunder.

REFERENCES:
patent: 6600851 (2003-07-01), Aksyuk et al.
patent: 6781744 (2004-08-01), Aksyuk et al.

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