Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-10-31
2006-10-31
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S053000, C355S071000, C355S067000, C359S365000, C359S857000, C359S859000, C378S034000, C250S548000
Reexamination Certificate
active
07130018
ABSTRACT:
A catoptric projection optical system for projecting a reduced size of a pattern on an object surface onto an image surface includes eight mirrors and forms an intermediate image between the sixth mirror and the seventh mirror on an optical path, wherein a position in a height direction of a principal ray from an optical axis at each mirror displaces, and a displacement direction from the first mirror to the fourth mirror is reverse to that from the fifth mirror to the eight mirror, wherein the second mirror to the fifth mirror are a concave mirror, a convex mirror, a concave mirror and a concave mirror, and the seventh mirror to the eighth are a convex mirror and a concave mirror, and wherein the second mirror of the eight mirrors is located closest to the object surface side.
REFERENCES:
patent: 5686728 (1997-11-01), Shafer
patent: 6172825 (2001-01-01), Takahashi
patent: 6353470 (2002-03-01), Dinger
patent: 6600552 (2003-07-01), Dinger
patent: 2002/0056815 (2002-05-01), Mann et al.
patent: 2002/0145718 (2002-10-01), Dinger
patent: 2002/0154395 (2002-10-01), Mann et al.
patent: 2004/0012866 (2004-01-01), Mann et al.
patent: 2004/0070743 (2004-04-01), Hudyma et al.
patent: 10-90602 (1998-04-01), None
patent: 2000-100694 (2000-04-01), None
patent: 2000-235144 (2000-08-01), None
patent: 2002-107630 (2002-04-01), None
patent: 2002-116382 (2002-04-01), None
patent: 2002-116382 (2002-04-01), None
patent: 2000-139672 (2002-05-01), None
An Office Action (Notice of Reasons for Rejection) dated Jun. 14, 2005 from Japanese Patent Office and translation.
Taiwanese Office Action dated Nov. 18, 2005 with English translation.
Japanese Office Action along with English translation dated May 30, 2006.
Canon Kabushiki Kaisha
Morgan & Finnegan , LLP
Rutledge D.
LandOfFree
Catoptric projection optical system, exposure apparatus and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Catoptric projection optical system, exposure apparatus and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Catoptric projection optical system, exposure apparatus and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3675451