Ferroelectric capacitor

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor

Reexamination Certificate

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Details

C361S305000, C361S306100, C361S306300, C361S321100, C361S321200, C361S311000, C361S313000

Reexamination Certificate

active

07057874

ABSTRACT:
A ferroelectric capacitor including a lower electrode, a ferroelectric layer and an upper electrode. A part of at least any one of the lower and upper electrodes is formed of a material selected from the group consisting of TiOx, TaOx, ReOx, WOx, IrO2, PtO2, RuOx, PdOx, and OsOx.

REFERENCES:
patent: 5122923 (1992-06-01), Matsubara et al.
patent: 5164808 (1992-11-01), Evans et al.
patent: 5262920 (1993-11-01), Sakuma et al.
patent: 5723361 (1998-03-01), Azuma et al.

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