Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2006-11-14
2006-11-14
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
C356S400000, C356S614000, C250S548000, C355S053000, C355S055000
Reexamination Certificate
active
07136165
ABSTRACT:
A substrate alignment apparatus which aligns and fixes a substrate on a substrate stage includes a chucking pad fixed on the substrate stage to chuck and fix the substrate, a moving unit which moves the substrate with respect to the substrate stage such that a mark on the substrate stage and a mark on the substrate coincide with each other, and a determination unit which evaluates and controls a relative position between the chucking pad and the substrate after movement by the moving unit and determines whether the chucking pad can normally chuck the substrate.
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