Method and system for scheduling maintenance procedures...

Details Method and system for scheduling maintenance procedures... Method and system for scheduling maintenance procedures...

2006-10-10

2006-10-10

Von Buhr, Maria N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

Reexamination Certificate

active

07120511

ABSTRACT:
The present invention is generally directed to various methods and systems for scheduling maintenance procedures based upon workload distribution. In one illustrative embodiment, the method includes providing a tool, identifying a planned processing schedule for processing a plurality of wafer lots in the tool, and providing a controller that schedules a time for a maintenance procedure to be performed on the tool based upon the planned processing schedule of the plurality of wafer lots.

REFERENCES:
patent: 5040123 (1991-08-01), Barber et al.
patent: 5216612 (1993-06-01), Cornett et al.
patent: 5940298 (1999-08-01), Pan et al.
patent: 6303395 (2001-10-01), Nulman
patent: 6408220 (2002-06-01), Nulman
patent: 6456894 (2002-09-01), Nulman
patent: 6757580 (2004-06-01), Shimada et al.
patent: 6785586 (2004-08-01), Toprac et al.
patent: 6879866 (2005-04-01), Tel et al.
patent: 6952656 (2005-10-01), Cordova et al.
patent: 6983188 (2006-01-01), Loughran et al.
patent: 6999829 (2006-02-01), Bazzocchi et al.

Affiliated with

Also associated with

Rating

Method and system for scheduling maintenance procedures... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and system for scheduling maintenance procedures..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and system for scheduling maintenance procedures... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3674185