Detecting faults in a micro electro mechanical device...

Details Detecting faults in a micro electro mechanical device... Detecting faults in a micro electro mechanical device...

2006-02-14

2006-02-14

Pham, Hai (Department: 2853)

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C347S056000, C347S061000

Reexamination Certificate

active

06997534

ABSTRACT:
A method of detecting a fault, in a micro electro-mechanical device of a type having a support structure and an actuating arm that is moveable relative to the support structure under the influence of a heat inducing current flow, in which a single current pulse is passed through the moveable arm and movement of the arm in response thereto is determined.

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“Design, Fabrication, and Testing of a C-shape Actuator” (Lin G et al) International Conference on Solid-State Sensors and Actuators and Eurosensors, vol. 2, Jun. 25, 1995 pp. 416-419 XP020305150—the whole document.

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