Radiant energy – With charged particle beam deflection or focussing – With detector
Patent
1999-03-26
2000-04-04
Nguyen, Kiet T.
Radiant energy
With charged particle beam deflection or focussing
With detector
324459, 324462, 3133631, G01L 2132
Patent
active
060464569
ABSTRACT:
An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.
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D.G. Bills, "Causes of nonstability and nonreproducibility in widely used Bayard-Alpert ionization gauges," J. Vac. Sci. Technol. A12, 574 (1994), pp. 574-579.
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Helix Technology Corporation
Nguyen Kiet T.
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