Miniature movable device

Optical waveguides – With optical coupler – Switch

Reexamination Certificate

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Details

C385S147000

Reexamination Certificate

active

07003193

ABSTRACT:
A movable part formed on a substrate and adapted to be displaced in a direction parallel to the sheet surface of the substrate, a fixing part formed and fixedly mounted on the substrate, and springy hinges extending parallel to the sheet surface of the substrate and having their opposite ends connected to the movable part and the fixing part for supporting the movable part in a displaceable manner are provided. As viewed in cross section in a plane perpendicular to the lengthwise direction of the hinges, the hinge has a width which is diminishing as the top surface of the substrate is approached, thus having a trapezoidal or triangular cross section. A width as measured on the top surface of the hinge which is required to provide an equivalent spring constant can be chosen to be greater than the width of a hinge having a rectangular cross section (constant width), and this facilitates the implementation of the photolithography during the manufacture.

REFERENCES:
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patent: 6315462 (2001-11-01), Anthamatten et al.
patent: 2002/0102059 (2002-08-01), Cho et al.
patent: 2003/0027370 (2003-02-01), Helin
patent: 2004/0184132 (2004-09-01), Novotny et al.
patent: 2005/0014368 (2005-01-01), Yoshioka et al.
patent: WO 9414187 (1994-06-01), None
Larsen, et al.: “MEMS device for bending test: measurements of fatigue and creep of electroplated nickel,” pp. 156-164, paper presented at 15th IEEE Conference, Las Vegas, US, Jan. 2002; Elsevier Science, 2003 XP 4400395.
Li, et al.: Focused ion Beam (FIB) Nano-Machining and FIB Moiré Technique for Strain Analysis in MEMS/NEMS Structures and Devices,: 2003 IEEE, pp. 674-677, XP 10637062.

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