Thin film thickness measurement using multichannel infrared...

Details Thin film thickness measurement using multichannel infrared... Thin film thickness measurement using multichannel infrared...

2006-08-08

2006-08-08

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S637000, C356S630000, C356S419000, C250S559280

Reexamination Certificate

active

07088456

ABSTRACT:
A system and method for analyzing the characteristics of a thin film is provided. The current invention extends the capability of IR sensors to measure thin films through configuring a plurality of detection channels with appropriately chosen filters. With the multichannel infrared sensor, the characteristic signature of interference fringes can be detected simultaneously with, or instead, of absorption-based measurements.

REFERENCES:
patent: 6281678 (2001-08-01), King et al.
patent: 6459488 (2002-10-01), Heffner
patent: 6515746 (2003-02-01), Opsal et al.
patent: 6556306 (2003-04-01), Jiang et al.
patent: 6573999 (2003-06-01), Yang
patent: 6646752 (2003-11-01), Chen et al.

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