Method of and an apparatus for measuring a specimen by means...

Details Method of and an apparatus for measuring a specimen by means... Method of and an apparatus for measuring a specimen by means...

2006-02-14

2006-02-14

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C073S105000

Reexamination Certificate

active

06998602

ABSTRACT:
The invention relates to a method of and an apparatus for measuring a specimen by means of a scanning probe microscope, especially a scanning force microscope, wherein a probe (5) is displaced with respect to a specimen (6) by means of lateral and vertical shifting units (1) to measure the specimen (6); measuring light rays (21) are generated by means of a light source (20) and directed to a reflection means (91) disposed on the probe; the measuring light rays (21) are reflected at the reflection means (91), whereby reflected measuring light rays (21a) are formed; and the reflected measuring light rays (21a) are directed by means of a correction lens (47) to a detector surface (32) of a detector means (27) to generate a measurement signal, the correction lens (47) being positioned at a distance from the detector surface (32) substantially corresponding to a focal length of the correction lens (47).

REFERENCES:
patent: 5616916 (1997-04-01), Handa et al.
patent: 6032518 (2000-03-01), Prater et al.
patent: 6910368 (2005-06-01), Ray
patent: 0 564 088 (1993-10-01), None
Werf Van Der. K. et al., “Compact Stand-Alone Atomic Force Microscope”, Review of Scientific Instruments, Oct., 1993, pp. 2892-2897, vol. 64, No. 10, American Institute of Physics, New York.

Affiliated with

Also associated with

Rating

Method of and an apparatus for measuring a specimen by means... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of and an apparatus for measuring a specimen by means..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of and an apparatus for measuring a specimen by means... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3670850