Semi-conductor wafer retention clip

Details Semi-conductor wafer retention clip Semi-conductor wafer retention clip

1990-11-21

1993-02-02

Kisliuk, Bruce M.

Work holders

Relatively movable jaws

Means to actuate jaw

269155, 269157, 269265, B25B 100

Patent

active

051832453

ABSTRACT:
A clip for removably securing a semi-conductor wafer to the treatment surface of a semi-conductor wafer processing pedestal. The clip is constructed with a pair of spaced apart, forwardly extending tines adapted to engage outer edges of a semi-conductor wafer supported upon the treatment surface. A clip tail is oppositely disposed from the tines and affords resilient movement of the tines toward and away from the edges of the pedestal treatment surface to enable the installation and removal of the wafer therefrom.

REFERENCES:
patent: 2342146 (1991-11-01), Joyce
patent: 3218058 (1965-11-01), Smith
patent: 4776744 (1988-10-01), Stonestreet et al.
patent: 4911597 (1990-03-01), Maydan et al.
patent: 4915367 (1990-04-01), Carossino

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