Laser scanning apparatus and methods for thermal processing

Details Laser scanning apparatus and methods for thermal processing Laser scanning apparatus and methods for thermal processing

2006-12-26

2006-12-26

Johnson, Jonathan (Department: 1725)

Electric heating

Metal heating

By arc

C219S121650

Reexamination Certificate

active

07154066

ABSTRACT:
Apparatus and methods for thermally processing a substrate with scanned laser radiation are disclosed. The apparatus includes a continuous radiation source and an optical system that forms an image on a substrate. The image is scanned relative to the substrate surface so that each point in the process region receives a pulse of radiation sufficient to thermally process the region.

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