Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate
2006-11-28
2006-11-28
Allen, Stephone B. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
C250S559300, C355S053000
Reexamination Certificate
active
07141813
ABSTRACT:
An exposure apparatus for exposing a substrate moving in a scan direction to light directed via an original. The apparatus includes a projection optical system configured to image a pattern of the original on the substrate, a substrate stage configured to hold the substrate and to move, and a detector configured to detect a surface position of the substrate, held and moved in the scan direction at a scan speed by the substrate stage, in a direction parallel to an optical axis of the projection optical system over a detection region preset on the substrate. The apparatus further includes a controller configured to preset the detection region, to change a detection time over which the detector detects a surface position of the substrate based on a change in the scan speed of the substrate stage so that the detector detects a surface position of the substrate over the preset detection region, and to control at least one of a position and a tilt of the substrate stage with respect to the direction parallel to the optical axis based on a detection obtained by the detector.
REFERENCES:
patent: 5917580 (1999-06-01), Ebinuma et al.
patent: 5920398 (1999-07-01), Iwanaga et al.
patent: 6130751 (2000-10-01), Haginiwa et al.
patent: 6426508 (2002-07-01), Kosugi et al.
patent: 2001/0020687 (2001-09-01), Yamada et al.
Allen Stephone B.
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
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