Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor
Reexamination Certificate
2006-10-31
2006-10-31
Gupta, Yogendra N. (Department: 1722)
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
C108S109000, C108S117000, C108S051300, C108S051300, C108S051300
Reexamination Certificate
active
07129110
ABSTRACT:
A method for manufacturing a semiconductor device having projection electrodes on the surface of a semiconductor substrate. This method include an electrode forming step of forming the projection electrodes on the surface of the semiconductor substrate, a step of forming a protective resin layer on the whole surface of the semiconductor substrate provided with the projection electrodes, a back side grinding step of thinning the semiconductor substrate by polishing or grinding the back side of the semiconductor substrate, and a surface grinding step of exposing the projection electrodes by polishing or grinding the surface side of the semiconductor substrate.
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Gupta Yogendra N.
Rabin & Berdo P.C.
Rohm & Co., Ltd.
Song Matthew J.
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