System for determining characteristics of substrates...

Details System for determining characteristics of substrates... System for determining characteristics of substrates...

2006-05-02

2006-05-02

Williams, Hezron (Department: 2856)

Measuring and testing

Inspecting

C073S865900

Reexamination Certificate

active

07036389

ABSTRACT:
The present invention provides a system for determining characteristics of substrates, such as the presence of contaminants, shape, as well as the spatial relationships between spaced-apart substrates. The spatial relationships include distance and angular orientation between first and second spaced apart substrates.

REFERENCES:
patent: 6016696 (2000-01-01), Bair et al.
patent: 6190929 (2001-02-01), Wang et al.

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