Method for forming gang bonding bumps on integrated circuit semi

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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427 89, 427 91, 427261, 29589, 29630R, 428901, B05D 512, H01L 2348

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active

040429547

ABSTRACT:
Gang bonding bumps, for making electrical connection to a metallic intraconnect pattern of metallization on an integrated circuit semiconductive device, are adhered to the interconnect pattern via the intermediary of a series of transition layers. These transition layers include a first layer of chromium, vacuum evaporated over the metallic interconnect pattern for providing a tightly adherent connection thereto. A layer of aluminum and chromium is vacuum evaporated over the chromium layer. A second layer of chromium is vacuum evaporated over the aluminum and chromium layer and a gold layer is deposited overlaying the chromium layer. The gold layer interfaces with the electroplated layers of the bump, which in a preferred embodiment consists of a lower layer of nickel covered by a layer of copper.

REFERENCES:
patent: 3480841 (1969-11-01), Castrucci et al.
patent: 3622385 (1971-11-01), Stork
patent: 3706015 (1972-12-01), Schimmer et al.

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