Optical element holder, exposure apparatus, and device...

Details Optical element holder, exposure apparatus, and device... Optical element holder, exposure apparatus, and device...

2006-05-30

2006-05-30

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Lens

With support

C359S819000

Reexamination Certificate

active

07054079

ABSTRACT:
An optical element holder for holding an optical element includes a holding element to hold the optical element or a holding part provided to the optical element unitedly, wherein there is substantially no heat exchange between the optical element and the holding element or the holding part and the holding element.

REFERENCES:
patent: 5177641 (1993-01-01), Kobayashi et al.
patent: 6825997 (2004-11-01), Hubbard et al.
patent: 07191248 (1995-07-01), None
patent: 10-206714 (1998-08-01), None
patent: 2001-343576 (2001-12-01), None
English Abstract for Japanese Patent Application Laid-Open No. 2001-343576 A.
English Abstract for Japanese Patent Application Laid-Open No. 10-206714 A.

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