Vented MEMS structures and methods

Details Vented MEMS structures and methods Vented MEMS structures and methods

2006-11-07

2006-11-07

Jacyna, J. Casimer (Department: 3751)

Valves and valve actuation

Fluid actuated or retarded

Reexamination Certificate

active

07131628

ABSTRACT:
A vent connects a chamber to the external atmosphere surrounding a device to equalize pressure within the chamber. The vent has a size and shape to allow pressure equalization to occur outside a normal operating cycle of the chamber and controls the pressure to prevent undesirable deflection of a membrane within the chamber and ensure proper operation of the device.

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