Process for fabricating films of uniform properties on...

Details Process for fabricating films of uniform properties on... Process for fabricating films of uniform properties on...

2006-06-13

2006-06-13

Lee, Hsien-Ming (Department: 2823)

Semiconductor device manufacturing: process

With measuring or testing

C438S016000, C438S795000, C427S573000, C427S574000

Reexamination Certificate

active

07060514

ABSTRACT:
A process for forming a thin layer exhibiting a substantially uniform property on an active surface of a semiconductor substrate includes varying the temperature within a reaction chamber while a layer of a material is formed upon the semiconductor substrate. Varying the temperature within the reaction chamber facilitates temperature uniformity across the semiconductor wafer. As a result, a layer forming reaction occurs at a substantially consistent rate over the entire active surface of the semiconductor substrate. The process may also include oscillating the temperature within the reaction chamber while a layer of a material is being formed upon a semiconductor substrate.

REFERENCES:
patent: 4132818 (1979-01-01), Chappelow et al.
patent: 4395438 (1983-07-01), Chiang
patent: 4742020 (1988-05-01), Roy
patent: 4872947 (1989-10-01), Wang et al.
patent: 4963506 (1990-10-01), Liaw et al.
patent: 4986877 (1991-01-01), Tachi et al.
patent: 5034688 (1991-07-01), Moulene et al.
patent: 5231356 (1993-07-01), Parker
patent: 5400739 (1995-03-01), Kao et al.
patent: 5436172 (1995-07-01), Moslehi
patent: 5482739 (1996-01-01), Hey et al.
patent: 5551985 (1996-09-01), Brors et al.
patent: 5571603 (1996-11-01), Utumi et al.
patent: 5607773 (1997-03-01), Ahlburn et al.
patent: 5618761 (1997-04-01), Eguchi et al.
patent: 5635409 (1997-06-01), Moslehi
patent: 5776557 (1998-07-01), Okano et al.
patent: 5790750 (1998-08-01), Anderson
patent: 5830277 (1998-11-01), Johnsgard et al.
patent: 5932286 (1999-08-01), Beinglass et al.
patent: 5970383 (1999-10-01), Lee
patent: 5976990 (1999-11-01), Mercaldi et al.
patent: 5989718 (1999-11-01), Smith et al.
patent: 6083852 (2000-07-01), Cheung et al.
patent: 6162488 (2000-12-01), Gevelber et al.
patent: 6352591 (2002-03-01), Yieh et al.
patent: 6833280 (2004-12-01), Mercaldi et al.
patent: 10-206020 (1998-08-01), None

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