Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-06-27
2006-06-27
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S512000
Reexamination Certificate
active
07068376
ABSTRACT:
A method including: generating a sequence of phase-shifted interferometry images of an object surface relative to a reference surface; and calculating an unequally weighted average of the phase-shifted interferometry images to produce a final image. The final image can be useful as a lateral metrology image. The method may further include calculating a surface topography image from the sequence of phase-shifted interferometry images. Embodiments further include apparatus related to the method.
REFERENCES:
patent: 6741357 (2004-05-01), Wang et al.
Phase Shifting Interfrometry, Wyant, 1998.
Peter de Groot, “Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window”,Applied Optics, vol. 34, No. 22, pp. 4723-4730 (Aug. 1, 1995).
Peter de Groot, “Phase-shift calibration errors in interferometers with spherical Fizeau cavities”,Applied Optics, vol. 34, No. 16, pp. 2856-2863 (Jun. 1, 1995).
Joanna Schmit et al., “Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry”,Applied Optics, vol. 34, No. 19, pp. 3610-3619 (Jul. 1, 1995).
Fish & Richardson P.C.
Turner Samuel A.
Zygo Corporation
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