Switching semiconductor device and switching circuit

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor

Reexamination Certificate

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C257S011000, C257S024000, C257S027000, C257S130000, C257S131000, C257S143000, C257S149000, C257S151000, C257S153000, C257S154000, C257S155000, C257S160000, C257S161000, C257S194000, C257S195000, C257S918000

Reexamination Certificate

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07064359

ABSTRACT:
A switching semiconductor device includes a first compound layer formed on a single crystal substrate which includes silicon carbide or sapphire, and including a general formula InxGa1-xN, where 0≦x≦1; a second compound layer formed on the first compound layer, and including a general formula InyALzGa1-y-zN, where 0≦y≦1 and 0<z≦1; and a gate electrode formed on the second compound layer. The gate electrode is electrically connected to a resistance element formed on a first interlayer insulating film that covers the gate electrode, through a metal wiring formed on a second interlayer insulating film that covers the first interlayer insulating film.

REFERENCES:
patent: 4481521 (1984-11-01), Okumura
patent: 2002/0052076 (2002-05-01), Khan et al.
patent: 2002/0121647 (2002-09-01), Taylor
patent: 2003/0020091 (2003-01-01), Tungare et al.
patent: 2003/0034545 (2003-02-01), Johnson et al.
patent: 2003/0036213 (2003-02-01), Brophy
patent: 2004/0070003 (2004-04-01), Gaska et al.
patent: 2004/0150043 (2004-08-01), Holm et al.
patent: 2004/0173816 (2004-09-01), Saxler
patent: 2005/0167775 (2005-08-01), Nagy et al.
patent: 9-246471 (1997-09-01), None
Miyatsuji, Kazuo., et al. “A GaAs High Power RF Single Pole Dual Throw Switch IC for Digital Mobile Communication System.” IEEE Journal of Solid State Circuits, vol. 30, No. 9, Sep. 1995, pp. 979-983.

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